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ISO 13424:2013
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ISO 13424:2013
Surface chemical analysis — X-ray photoelectron spectroscopy — Reporting of results of thin-film analysisMore info
ISO 13424:2013 specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.
| Author | ISO/TC 201/SC 7 Electron spectroscopies |
|---|---|
| Editor | ISO |
| Document type | Standard |
| Format | Paper |
| Edition | 1 |
| ICS | 71.040.40 : Chemical analysis
|
| Number of pages | 46 |
| Weight(kg.) | 0.1782 |
| Year | 2013 |
| Country | Switzerland |