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JIS H 0614:1996 (R2015)
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JIS H 0614:1996 (R2015)
Visual inspection for silicon wafers with specular surfacesMore info
| Author | JSA |
|---|---|
| Editor | JSA |
| Document type | Standard |
| Format | File |
| Confirmation date | 2015-10-20 |
| ICS | 29.045 : Semiconducting materials
77.120.99 : Other non-ferrous metals and their alloys |
| Number of pages | 8 |
| Year | 1990 |
| Document history | |
| Country | Japan |
| Keyword | JIS 0614;0614;JIS H 0614-1996 |