Cart
0
Product
Products
(empty)
No products
To be determined
Shipping
$0.00
Total
Product successfully added to your shopping cart
Quantity
Total
There are 0 items in your cart.
There is 1 item in your cart.
Total products
Total shipping
To be determined
Total
Reduced price!
View larger
View larger
JIS B 9960-33:2012 (R2017)
New product
JIS B 9960-33:2012 (R2017)
Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipmentMore info
This Japanese Industrial Standard applies to electrical equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.
| Author | JSA |
|---|---|
| Editor | JSA |
| Document type | Standard |
| Format | File |
| Confirmation date | 2017-10-20 |
| ICS | 13.110 : Safety of machinery
31.080.01 : Semiconductor devices in general |
| Number of pages | 124 |
| Cross references | IEC 60204-33 (2009-12), IDT |
| Year | 2012 |
| Document history | |
| Country | Japan |
| Keyword | JIS B 9960;JIS 9960;9960 |