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JIS C 5630-13:2014

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JIS C 5630-13:2014

Semiconductor devices - Micro-electromechanical devices - Part 13: Bend-and shear-type test methods of measuring adhesive strength for MEMS structures

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Author JSA
Editor JSA
Document type Standard
Format File
ICS 31.080.01 : Semiconductor devices in general
31.220.01 : Electromechanical components in general
Number of pages 12
Cross references IEC 62047-13 (2012-02), IDT
Year 2014
Document history
Country Japan
Keyword JIS C 5630;JIS 5630;5630