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JIS R 1683:2014

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JIS R 1683:2014

Test method for surface roughness of ceramic thin films by atomic force microscopy

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Author JSA
Editor JSA
Document type Standard
Format File
ICS 81.060.30 : Advanced ceramics
Number of pages 24
Replace JIS R 1683 (2007-11-20)
Year 2014
Document history JIS R 1683 (2014-10-20)
Country Japan
Keyword JIS 1683;1683