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BS ISO 17109:2015

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BS ISO 17109:2015

Surface chemical analysis. Depth profiling. Method for sputter rate determination in X-ray photoelectron spectroscopy. Auger electron spectroscopy and secondary-ion mass spectrometry sputter depth profiling using single and multi-layer thin films

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Author BSI
Editor BSI
Document type Standard
Format File
EAN ISBN 978 0 580 79589 3
ICS 71.040.40 : Chemical analysis
Number of pages 28
Cross references ISO 17109:2015
Set MYSTD-20STD
Year 2015
Country United Kingdom
Keyword BS ISO 17109 ; BSISO17109 ; BSISO 17109 ; BS ISO17109