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ASTM D5127-13(2018)
New product
ASTM D5127-13(2018)
Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor IndustriesMore info
1.1 This guide provides recommendations for water quality related to electronics and semiconductor-industry manufacturing. Seven classifications of water are described, including water for line widths as low as 0.032 μm. In all cases, the recommendations are for water at the point of distribution (POD).
| Author | ASTM |
|---|---|
| Editor | ASTM |
| Document type | Standard |
| Format | File |
| Confirmation date | 2018-10-15 |
| ICS | 13.060.25 : Water for industrial use
71.100.99 : Other products of the chemical industry |
| Number of pages | 6 |
| Replace | ASTM D5127-13 |
| Set | ASTMVOL1101 |
| Year | 2013 |
| Document history | ASTM D5127-13 |
| Country | USA |
| Keyword | ASTM 5127;ASTM D5127;ASTM D5127;10.1520/D5127-13R18 |