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ASTM E2244-11(2018)
New product
ASTM E2244-11(2018)
Standard Test Method for In-Plane Length Measurements of Thin, Reflecting Films Using an Optical InterferometerMore info
1.1 This test method covers a procedure for measuring in-plane lengths (including deflections) of patterned thin films. It applies only to films, such as found in microelectromechanical systems (MEMS) materials, which can be imaged using an optical interferometer, also called an interferometric microscope.
| Author | ASTM |
|---|---|
| Editor | ASTM |
| Document type | Standard |
| Format | File |
| Confirmation date | 2018-05-01 |
| ICS | 37.040.20 : Photographic paper, films and plates. Cartridges
|
| Number of pages | 14 |
| Replace | ASTM E2244-11e1 |
| Set | ASTMVOL0301 |
| Year | 2011 |
| Document history | ASTM E2244-11e1 |
| Country | USA |
| Keyword | ASTM 2244;ASTM E2244;ASTM E2244;10.1520/E2244-11R18 |