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ISO 16700:2016
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ISO 16700:2016
Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnificationMore info
ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.
| Author | ISO/TC 202/SC 4 Scanning electron microscopy (SEM) |
|---|---|
| Editor | ISO |
| Document type | Standard |
| Format | Paper |
| Edition | 2 |
| ICS | 37.020 : Optical equipment
|
| Number of pages | 18 |
| Replace | ISO 16700:2004 |
| Weight(kg.) | 0.1306 |
| Year | 2016 |
| Country | Switzerland |