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ISO 16413:2013

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ISO 16413:2013

Evaluation of thickness, density and interface width of thin films by X-ray reflectometry — Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

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Author ISO/TC 201 Surface chemical analysis
Editor ISO
Document type Standard
Format Paper
Edition 1
ICS 35.240.70 : IT applications in science
Number of pages 30
Weight(kg.) 0.1510
Year 2013
Country Switzerland