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AS ISO 14606-2006

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AS ISO 14606-2006 [ Withdrawn ] Surface chemical analysis - Sputter depth profiling - Optimization using layered systems as reference materials

standard by Standards Australia, 10/20/2006

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Adopts ISO 14606:2000 to give guidance on the optimization of sputter depth profiling parameters using appropriate single-layered and multi-layered reference materials in order to achieve optimum depth resolution as a function of instrument settings.

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Edition: 1st Published: 10/20/2006 ISBN(s): 0733777953 Number of Pages: 15 File Size: 1 file , 690 KB Product Code(s): 10148313, 10148302, 10148310